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Piezo, X: 100µm±15%, F: 14.7N

Reference: OSE-SFS-H60XY(CL)

Part number: OSE-SFS-H60XY(CL)
Name: Sigma Fine (Piezo) Stages

4 200,00 € tax excl.

Delivery time: until 3 Weeks

Berker Anil Ödül
Sales Engineer
+49 8153 405-32
Product request: Piezo, X: 100µm±15%, F: 14.7NX

Dear Herr Ödül,

I am interested in the following product: Piezo, X: 100µm±15%, F: 14.7N

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Product description
  • Travel [mm]: 100?m±15%
  • Table Size [mm]: 60x60
  • Actuator: Piezo actuator
  • Weight [kg]: 0.43
  • Theoretical Resolution (open-loop) [nm]: 1
  • Resolution (closed-loop) [nm]: 10
  • Linearity [%]: 0.3 or lower
  • Perpendicularity (Horizontal Direction) [?m: 0.1 or lower
  • Load Capacity [N]: 14.7
  • Micro-displacement Sensor: Digital sensor
  • Compatible Cable: FINE-CA-3: For piezo DS1-CA-3: For digital sensor

Downloads - Piezo, X: 100µm±15%, F: 14.7N

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