The modern and compact MLI Excimer Laser series from MLase are UV light sources at 193 nm or 248 nm with high pulse energies up to 16 mJ and repetition rates up to 1,000 Hz !
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• Rigid, industry grade design
→ High reliability
• Corona Preionization
→ Homogeneous beam profile
• Modern Solid State Pulsed Power Module
→ Immediate availability, no aging
• Tube Technology with higher gas capacity
→ Tube all metal sealed for extended lifetimes
• Energy Monitor
→ Energy stabilizing
• Compact Excimerlaser, Single Phase
→ Easy to operate, easy to integrate
These compact stand-alone UV Lasers offer the best life times and reliability available on the market. With a homogeneous beam profile and energy stabilization, they are ideal for demanding applications. Simple connection via USB and control with the included software allow quick setup and easy Integration.
Customized OEM versions with individual features based on the standard products can also be offered. Integrators benefit from standardized interfaces and a strong local support team.
MLI models with the suffix "LC" also have the possibility of active water cooling (either via domestic water, or external heat exchanger, no DI water required) and thus allow a stable continuous operation at 100 % duty cycle.
Available wavelengths are 193 nm (gas: ArF - Argonflourid) and 248 nm (gas: KrF - Kryptonflourid). Other wavelengths are available on request.
Please consult Laser 2000 for support with planning and setting up an appropriate system for the supply of the laser gases.
System control is performed through a simple USB interface, RS232, or over a serial fiber optic connection. All changeable parameters (eg, repetition rate, pump voltage, etc.) and automatic gas exchange can be carried out using the software supplied.
Max. repetition rate (Hz)
Stabilized avg. power (W)
Stabilized Pulse Energy (mJ)
Energy Stability (sigma, %)
Beam Dimensions (FWHM, V x H mm)
Beam Divergence (FWHM, V x H mrad)
Pulse Duration (FWHM) (ns)
Weight / Utilites / Dimensions:
Dimensons (L x B x H)
560 x 315 x 445 mm³
560 x 355 x 445 mm²
ca. 75 kg
ca. 80 kg
230V, 50/60Hz, 2000W max.
230V, 50/60Hz, 2000W max.
|Lifetime Data:||MLase||typical competitor Values|
|dynamic gas lifetime (stab. at 4 mJ)||50 – 100 MP||~ 20 MP|
|static (passive) gas lifetime||2 – 3 months||~ 1 – 2 weeks|
|resonator optics||>> 200 MP||~ 100 MP|
|resonator tube||> 4 GP||~ 1 GP|
Links with further information about Excimer Lasers:
Systems, Modules and Components Laser & Light Sources catalogueDownload (2.9M)