The TRUE NANO (TM) motion systems from ALIO are in several standard versions and for highest precision in the nanometer range available.
If needed, most of the axes can be used as XY-stacks or offerend as XYZ-Versions.
These version of ALIO stages use enclosed ceramic servo motors or linear motors. This technology allows us to use and modify them for applications in atmospheric, clean room and vacuum environments requiring ultra clean, extremely precise movement with high reliability.
In most cases OEM-solutions are necessary to meet exactly the requirements in demanding customer applications.
Typical applications can be found in metrology, wafer production or in biomedical applications.
If you compare the technical specifications with competitor specifications you will find, that even with standard-products we compete at highest level of accuracy. In many aspects the ALIO solutions exceed the competitors performance.
The 400 mm stage for example comes standard with less than 10 microns of flatness with a precision crossed roller bearing enabling a 5 nm positioning accuracy.
Please find in the following some specifications of the standard stages, which are an interesting option with regards to their price to value ratio.
| Model | Dimensions (LxHxW) | Travel (mm) | Peak Force (N) | Speed (mm/sec) |
| AI-2500 | 93 x 36 x 82 | 25 | 8 | 250 |
| AI-5000 | 133 x 36 x 93 | 50 | 8 | 250 |
| HR4-10000 | 174 x 40 x 102 | 100 | 16 | 250 |
| AI-5000 | 174 x 40 x 102 | 50 | 84 | >1000 |
| AI-10000 | 242 x 40 x 102 | 100 | 84 | >1000 |
| LMR-40000 | 580 x 57.15 x 127 | 400 | 84 | >1000 |
Software and Controller:
These products can be interfaced to existing customer controllers or ordered with motion controllers and GUI software.
Advantages:- Highest precision down to 5 nm even with standard products
- Technology can be modified for ultra-high-vacuum-Applications.
- Adaption to your controller solutions possible
- Also as XY-stacks or XYZ-versions available
- Speeds of up to 250 mm/s
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